# Thermal Stability of DETF MEMS Resonators: Numerical Modelling and Experimental Validation

> Research article (2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), 2020) · cited 11× · AI/ML

**Wikidata**: [openalex:W3015916992](https://www.wikidata.org/wiki/openalex:W3015916992)  
**Source**: https://4ort.xyz/entity/thermal-stability-of-detf-mems-resonators-numerical-modelling-and-experimental-validation
