# Theoretical and experimental investigations of the primary and parametric resonances in repulsive force based MEMS actuators

> Research article (Sensors and Actuators A Physical, 2019) · cited 23× · AI/ML

**Wikidata**: [openalex:W2981618605](https://www.wikidata.org/wiki/openalex:W2981618605)  
**Source**: https://4ort.xyz/entity/theoretical-and-experimental-investigations-of-the-primary-and-parametric-resonances-in-repulsive-force-based-mems-actua