# Thelma-double: A New Technology Platform for Manufacturing of High-Performance Mems Inertial Sensors

> Research article (2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022) · cited 12× · AI/ML

**Wikidata**: [openalex:W4211137984](https://www.wikidata.org/wiki/openalex:W4211137984)  
**Source**: https://4ort.xyz/entity/thelma-double-a-new-technology-platform-for-manufacturing-of-high-performance-mems-inertial-sensors