# The Influence of Hydrogen on Defects of In–Ga–Zn–O Semiconductor Thin-Film Transistors With Atomic-Layer Deposition of Al<sub>2</sub>O<sub>3</sub>

> Research article (IEEE Electron Device Letters, 2016) · cited 41× · AI/ML

**Wikidata**: [openalex:W2512741556](https://www.wikidata.org/wiki/openalex:W2512741556)  
**Source**: https://4ort.xyz/entity/the-influence-of-hydrogen-on-defects-of-ingazno-semiconductor-thin-film-transistors-with-atomic-layer-deposition-of-al-s
