# The Impact of Damping on Flicker Frequency Noise of AlN Piezoelectric MEMS Resonators

> Research article (Journal of Microelectromechanical Systems, 2017) · cited 11× · AI/ML

**Wikidata**: [openalex:W2587095989](https://www.wikidata.org/wiki/openalex:W2587095989)  
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