# The future of EUV lithography: enabling Moore's Law in the next decade

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2017) · cited 62× · AI/ML

**Wikidata**: [openalex:W2598810261](https://www.wikidata.org/wiki/openalex:W2598810261)  
**Source**: https://4ort.xyz/entity/the-future-of-euv-lithography-enabling-moore-s-law-in-the-next-decade