# Textured hexagonal and cubic phases of AlN films deposited on Si (100) by DC magnetron sputtering and high power impulse magnetron sputtering

> Research article (Thin Solid Films, 2018) · cited 18× · AI/ML

**Wikidata**: [openalex:W2796784412](https://www.wikidata.org/wiki/openalex:W2796784412)  
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