# Texture and Stress Evolution in HfN Films Sputter-Deposited at Oblique Angles

> Research article (Coatings, 2019) · cited 28× · AI/ML

**Wikidata**: [openalex:W2982521802](https://www.wikidata.org/wiki/openalex:W2982521802)  
**Source**: https://4ort.xyz/entity/texture-and-stress-evolution-in-hfn-films-sputter-deposited-at-oblique-angles