# Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer

> Research article (Sensors, 2020) · cited 11× · AI/ML

**Wikidata**: [openalex:W3006811930](https://www.wikidata.org/wiki/openalex:W3006811930)  
**Source**: https://4ort.xyz/entity/temperature-gradient-method-for-alleviating-bonding-induced-warpage-in-a-high-precision-capacitive-mems-accelerometer