# Temperature compensation of a capacitive MEMS accelerometer by using a MEMS oscillator

> Research article (2016 IEEE International Symposium on Inertial Sensors and Systems, 2016) · cited 30× · AI/ML

**Wikidata**: [openalex:W2305315853](https://www.wikidata.org/wiki/openalex:W2305315853)  
**Source**: https://4ort.xyz/entity/temperature-compensation-of-a-capacitive-mems-accelerometer-by-using-a-mems-oscillator