# TEM sample preparation using micro-manipulator for in-situ MEMS experiment

> Research article (Han-guk hyeonmigyeong hakoeji/Applied microscopy, 2021) · cited 13× · AI/ML

**Wikidata**: [openalex:W3172846823](https://www.wikidata.org/wiki/openalex:W3172846823)  
**Source**: https://4ort.xyz/entity/tem-sample-preparation-using-micro-manipulator-for-in-situ-mems-experiment