# TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2023) · cited 13× · AI/ML

**Wikidata**: [openalex:W4319990433](https://www.wikidata.org/wiki/openalex:W4319990433)  
**Source**: https://4ort.xyz/entity/tcad-enabled-machine-learningan-efficient-framework-to-build-highly-accurate-and-reliable-models-for-semiconductor-techn