# TCAD-Enabled Machine Learning Defect Prediction to Accelerate Advanced Semiconductor Device Failure Analysis

> Research article (2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2019) · cited 44× · AI/ML

**Wikidata**: [openalex:W2980555067](https://www.wikidata.org/wiki/openalex:W2980555067)  
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