# TCAD Augmented Machine Learning for Semiconductor Device Failure Troubleshooting and Reverse Engineering

> Research article (2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), 2019) · cited 62× · AI/ML

**Wikidata**: [openalex:W2980921441](https://www.wikidata.org/wiki/openalex:W2980921441)  
**Source**: https://4ort.xyz/entity/tcad-augmented-machine-learning-for-semiconductor-device-failure-troubleshooting-and-reverse-engineering