# Surface Improvement of InAlAs/InGaAs InP-Based HEMT Through Treatments of UV/Ozone and TMAH

> Research article (IEEE Journal of the Electron Devices Society, 2020) · cited 11× · AI/ML

**Wikidata**: [openalex:W3034553524](https://www.wikidata.org/wiki/openalex:W3034553524)  
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