# Suppressed drift and low-noise sensor module with a single-axis gold proof-mass MEMS accelerometer for micro muscle sound measurement

> Research article (Japanese Journal of Applied Physics, 2022) · cited 16× · AI/ML

**Wikidata**: [openalex:W4220728322](https://www.wikidata.org/wiki/openalex:W4220728322)  
**Source**: https://4ort.xyz/entity/suppressed-drift-and-low-noise-sensor-module-with-a-single-axis-gold-proof-mass-mems-accelerometer-for-micro-muscle-soun
