# Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection

> Research article (IEEE Access, 2022) · cited 11× · AI/ML

**Wikidata**: [openalex:W4214755462](https://www.wikidata.org/wiki/openalex:W4214755462)  
**Source**: https://4ort.xyz/entity/supervised-multivariate-kernel-density-estimation-for-enhanced-plasma-etching-endpoint-detection