# Sub‐10‐nm Lithography for Sn4–Oxo Clusters: Effect of Molecular Polarity on Sensitivity and Resolution

> Research article (Advanced Functional Materials, 2025) · cited 16× · AI/ML

**Wikidata**: [openalex:W4409210072](https://www.wikidata.org/wiki/openalex:W4409210072)  
**Source**: https://4ort.xyz/entity/sub10nm-lithography-for-sn4oxo-clusters-effect-of-molecular-polarity-on-sensitivity-and-resolution