# Sub-pixel position estimation algorithm based on Gaussian fitting and sampling theorem interpolation for wafer alignment

> Research article (Applied Optics, 2021) · cited 13× · AI/ML

**Wikidata**: [openalex:W3201853833](https://www.wikidata.org/wiki/openalex:W3201853833)  
**Source**: https://4ort.xyz/entity/sub-pixel-position-estimation-algorithm-based-on-gaussian-fitting-and-sampling-theorem-interpolation-for-wafer-alignment