# Sub-nanometer resolution XPS depth profiling: Sensing of atoms

> Research article (Applied Surface Science, 2017) · cited 17× · AI/ML

**Wikidata**: [openalex:W2596748288](https://www.wikidata.org/wiki/openalex:W2596748288)  
**Source**: https://4ort.xyz/entity/sub-nanometer-resolution-xps-depth-profiling-sensing-of-atoms