# Sub-30 keV patterning of HafSOx resist: Effects of voltage on resolution, contrast, and sensitivity

> Research article (Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, 2016) · cited 10× · AI/ML

**Wikidata**: [openalex:W2468604011](https://www.wikidata.org/wiki/openalex:W2468604011)  
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