# SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

> Research article (Microsystems & Nanoengineering, 2016) · cited 39× · AI/ML

**Wikidata**: [openalex:W2519398326](https://www.wikidata.org/wiki/openalex:W2519398326)  
**Source**: https://4ort.xyz/entity/su8-etch-mask-for-patterning-pdms-and-its-application-to-flexible-fluidic-microactuators