# Study on Data Preprocessing for Machine Learning Based on Semiconductor Manufacturing Processes

> Research article (Sensors, 2024) · cited 14× · AI/ML

**Wikidata**: [openalex:W4401809537](https://www.wikidata.org/wiki/openalex:W4401809537)  
**Source**: https://4ort.xyz/entity/study-on-data-preprocessing-for-machine-learning-based-on-semiconductor-manufacturing-processes