# Study of the effect of the deposition rate and seed layers on structure and magnetic properties of magnetron sputtered FeNi films

> Research article (Vacuum, 2015) · cited 25× · AI/ML

**Wikidata**: [openalex:W650753028](https://www.wikidata.org/wiki/openalex:W650753028)  
**Source**: https://4ort.xyz/entity/study-of-the-effect-of-the-deposition-rate-and-seed-layers-on-structure-and-magnetic-properties-of-magnetron-sputtered-f