# Study of ion beam induced chemical effects in silicon with a downsized high resolution X-ray spectrometer for use with focused ion beams

> Research article (Journal of Analytical Atomic Spectrometry, 2016) · cited 22× · AI/ML

**Wikidata**: [openalex:W2521004237](https://www.wikidata.org/wiki/openalex:W2521004237)  
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