# Structural and morphological properties of TiN deposited by magnetron sputtering

> Research article (Surface Topography Metrology and Properties, 2018) · cited 16× · AI/ML

**Wikidata**: [openalex:W2893180651](https://www.wikidata.org/wiki/openalex:W2893180651)  
**Source**: https://4ort.xyz/entity/structural-and-morphological-properties-of-tin-deposited-by-magnetron-sputtering
