# Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction

> Research article (Nanomaterials, 2020) · cited 71× · AI/ML

**Wikidata**: [openalex:W3008206362](https://www.wikidata.org/wiki/openalex:W3008206362)  
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