# Stochastic printing failures in EUV lithography

> Research article (Extreme Ultraviolet (EUV) Lithography X, 2019) · cited 54× · AI/ML

**Wikidata**: [openalex:W2920925538](https://www.wikidata.org/wiki/openalex:W2920925538)  
**Source**: https://4ort.xyz/entity/stochastic-printing-failures-in-euv-lithography