# Stitching enablement for anamorphic imaging: a ~1μm exclusion band and its implications

> Research article (Extreme Ultraviolet Lithography 2020, 2020) · cited 11× · AI/ML

**Wikidata**: [openalex:W3088077366](https://www.wikidata.org/wiki/openalex:W3088077366)  
**Source**: https://4ort.xyz/entity/stitching-enablement-for-anamorphic-imaging-a-1m-exclusion-band-and-its-implications