# Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations

> Research article (Micromachines, 2021) · cited 11× · AI/ML

**Wikidata**: [openalex:W3189093571](https://www.wikidata.org/wiki/openalex:W3189093571)  
**Source**: https://4ort.xyz/entity/static-and-dynamic-analysis-of-electrostatically-actuated-mems-shallow-arches-for-various-air-gap-configurations
