# Stacked convolutional sparse denoising auto-encoder for identification of defect patterns in semiconductor wafer map

> Research article (Computers in Industry, 2019) · cited 96× · AI/ML

**Wikidata**: [openalex:W2943898222](https://www.wikidata.org/wiki/openalex:W2943898222)  
**Source**: https://4ort.xyz/entity/stacked-convolutional-sparse-denoising-auto-encoder-for-identification-of-defect-patterns-in-semiconductor-wafer-map