# Sputtering condition effect on structure and properties of LiNbO3 films

> Research article (Journal of Materials Science Materials in Electronics, 2015) · cited 17× · AI/ML

**Wikidata**: [openalex:W2089827711](https://www.wikidata.org/wiki/openalex:W2089827711)  
**Source**: https://4ort.xyz/entity/sputtering-condition-effect-on-structure-and-properties-of-linbo3-films
