# Spatial resolution and 2D chemical image of light-addressable potentiometric sensor improved by inductively coupled-plasma reactive-ion etching

> Research article (Sensors and Actuators B Chemical, 2017) · cited 23× · AI/ML

**Wikidata**: [openalex:W2781286897](https://www.wikidata.org/wiki/openalex:W2781286897)  
**Source**: https://4ort.xyz/entity/spatial-resolution-and-2d-chemical-image-of-light-addressable-potentiometric-sensor-improved-by-inductively-coupled-plas