# SnOx high-efficiency EUV interference lithography gratings towards the ultimate resolution in photolithography

> Research article (Microelectronic Engineering, 2016) · cited 41× · AI/ML

**Wikidata**: [openalex:W2282892712](https://www.wikidata.org/wiki/openalex:W2282892712)  
**Source**: https://4ort.xyz/entity/snox-high-efficiency-euv-interference-lithography-gratings-towards-the-ultimate-resolution-in-photolithography