# Single‐Component High‐Resolution Dual‐Tone EUV Photoresists Based on Precision Self‐Immolative Polymers

> Research article (Angewandte Chemie International Edition, 2024) · cited 11× · AI/ML

**Wikidata**: [openalex:W4402709685](https://www.wikidata.org/wiki/openalex:W4402709685)  
**Source**: https://4ort.xyz/entity/singlecomponent-highresolution-dualtone-euv-photoresists-based-on-precision-selfimmolative-polymers