# Simulating the warping of thin coated Si wafers using Ansys layered shell elements

> Research article (Composite Structures, 2016) · cited 40× · AI/ML

**Wikidata**: [openalex:W2225148412](https://www.wikidata.org/wiki/openalex:W2225148412)  
**Source**: https://4ort.xyz/entity/simulating-the-warping-of-thin-coated-si-wafers-using-ansys-layered-shell-elements