# Simulating massively parallel electron beam inspection for sub-20 nm defects

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 13× · AI/ML

**Wikidata**: [openalex:W2069676756](https://www.wikidata.org/wiki/openalex:W2069676756)  
**Source**: https://4ort.xyz/entity/simulating-massively-parallel-electron-beam-inspection-for-sub-20-nm-defects