# Similarity properties in capacitive radio frequency plasmas with nonlinear collision processes

> Research article (Plasma Sources Science and Technology, 2021) · cited 21× · AI/ML

**Wikidata**: [openalex:W3206596970](https://www.wikidata.org/wiki/openalex:W3206596970)  
**Source**: https://4ort.xyz/entity/similarity-properties-in-capacitive-radio-frequency-plasmas-with-nonlinear-collision-processes