# Signal response metrology (SRM): a new approach for lithography metrology

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 14× · AI/ML

**Wikidata**: [openalex:W2064697627](https://www.wikidata.org/wiki/openalex:W2064697627)  
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