# Serial-Kinematic Hybrid Electromagnetic-Piezoelectric AFM Scanner for High-Throughput Raster Scanning

> Research article (IEEE Transactions on Industrial Electronics, 2024) · cited 13× · AI/ML

**Wikidata**: [openalex:W4399768584](https://www.wikidata.org/wiki/openalex:W4399768584)  
**Source**: https://4ort.xyz/entity/serial-kinematic-hybrid-electromagnetic-piezoelectric-afm-scanner-for-high-throughput-raster-scanning