# Semiconductor Wafer Surface: Automatic Defect Classification with Deep CNN

> Research article (2020 IEEE REGION 10 CONFERENCE (TENCON), 2020) · cited 34× · AI/ML

**Wikidata**: [openalex:W3116557177](https://www.wikidata.org/wiki/openalex:W3116557177)  
**Source**: https://4ort.xyz/entity/semiconductor-wafer-surface-automatic-defect-classification-with-deep-cnn