# SEM image denoising with unsupervised machine learning for better defect inspection and metrology

> Research article (Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV, 2021) · cited 25× · AI/ML

**Wikidata**: [openalex:W3131980895](https://www.wikidata.org/wiki/openalex:W3131980895)  
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