# SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2017) · cited 14× · AI/ML

**Wikidata**: [openalex:W2600603926](https://www.wikidata.org/wiki/openalex:W2600603926)  
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