# SEM based overlay measurement between resist and buried patterns

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 11× · AI/ML

**Wikidata**: [openalex:W2343587645](https://www.wikidata.org/wiki/openalex:W2343587645)  
**Source**: https://4ort.xyz/entity/sem-based-overlay-measurement-between-resist-and-buried-patterns