# Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer

> Research article (Sensors, 2016) · cited 21× · AI/ML

**Wikidata**: [openalex:W2406454062](https://www.wikidata.org/wiki/openalex:W2406454062)  
**Source**: https://4ort.xyz/entity/self-locking-avoidance-and-stiffness-compensation-of-a-three-axis-micromachined-electrostatically-suspended-acceleromete