# Self Focusing SIMS: Probing thin film composition in very confined volumes

> Research article (Applied Surface Science, 2016) · cited 30× · AI/ML

**Wikidata**: [openalex:W2223876940](https://www.wikidata.org/wiki/openalex:W2223876940)  
**Source**: https://4ort.xyz/entity/self-focusing-sims-probing-thin-film-composition-in-very-confined-volumes
