# Secondary ion mass spectrometry investigation of carbon grain formation in boron nitride epitaxial layers with atomic depth resolution

> Research article (Journal of Analytical Atomic Spectrometry, 2019) · cited 11× · AI/ML

**Wikidata**: [openalex:W2916588224](https://www.wikidata.org/wiki/openalex:W2916588224)  
**Source**: https://4ort.xyz/entity/secondary-ion-mass-spectrometry-investigation-of-carbon-grain-formation-in-boron-nitride-epitaxial-layers-with-atomic-de
