# Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library

> Research article (Ultramicroscopy, 2015) · cited 114× · AI/ML

**Wikidata**: [openalex:W1977405399](https://www.wikidata.org/wiki/openalex:W1977405399)  
**Source**: https://4ort.xyz/entity/scanning-electron-microscope-measurement-of-width-and-shape-of-10-nm-patterned-lines-using-a-jmonsel-modeled-library