# Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2016) · cited 22× · AI/ML

**Wikidata**: [openalex:W2520043551](https://www.wikidata.org/wiki/openalex:W2520043551)  
**Source**: https://4ort.xyz/entity/scanning-coherent-diffractive-imaging-methods-for-actinic-extreme-ultraviolet-mask-metrology