# Robust multivariable estimation and control in an epitaxial thin film growth process under uncertainty

> Research article (Journal of Process Control, 2015) · cited 39× · AI/ML

**Wikidata**: [openalex:W1197831148](https://www.wikidata.org/wiki/openalex:W1197831148)  
**Source**: https://4ort.xyz/entity/robust-multivariable-estimation-and-control-in-an-epitaxial-thin-film-growth-process-under-uncertainty